US 12,132,466 B2
Vibrator device
Seiichiro Ogura, Minowa-machi (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Aug. 30, 2023, as Appl. No. 18/458,931.
Application 18/458,931 is a continuation of application No. 17/081,315, filed on Oct. 27, 2020, granted, now 11,784,630.
Claims priority of application No. 2019-197844 (JP), filed on Oct. 30, 2019.
Prior Publication US 2023/0412146 A1, Dec. 21, 2023
Int. Cl. H03H 9/19 (2006.01); G01P 3/44 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/19 (2013.01) [G01P 3/44 (2013.01); H03H 9/0557 (2013.01); H03H 9/0595 (2013.01); H03H 9/105 (2013.01); H03H 9/132 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A vibrator device comprising:
three axes orthogonal to each other being defined as an A-axis, a B-axis, and a C-axis;
a vibrator element; and
a support substrate facing the vibration element in a C-axis direction along the C-axis and supporting the vibrator element, wherein
the vibrator element includes
a base,
a drive arm on which a drive signal electrode is arranged, and
a detection arm on which a detection signal electrode is arranged,
the support substrate includes, in a plan view from the C-axis direction,
an element mounting base to which the base is fixed,
a frame-shaped supporting base surrounding the element mounting base, and
a beam portion connecting the element mounting base and the frame-shaped supporting base,
the drive arm and the detection arm overlap the frame-shaped supporting base in plan view,
the beam portion includes a plurality of first beams,
a drive signal wiring electrically connected to the drive signal electrode and a detection signal wiring electrically connected to the detection signal electrode are arranged on beams different from each other among the plurality of first beams.