US 12,132,465 B2
Tunable bulk acoustic wave (BAW) resonator based on application of radio-frequency (RF) signal to Bragg mirror metal layer
Jeronimo Segovia-Fernandez, San Jose, CA (US); Bichoy Bahr, Allen, TX (US); Ting-Ta Yen, San Jose, CA (US); Michael Henderson Perrott, Nashua, NH (US); and Zachary Schaffer, Las Vegas, NV (US)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed on Nov. 30, 2021, as Appl. No. 17/537,776.
Prior Publication US 2023/0170877 A1, Jun. 1, 2023
Int. Cl. H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01)
CPC H03H 9/175 (2013.01) [H03H 9/02015 (2013.01); H03H 9/131 (2013.01)] 20 Claims
OG exemplary drawing
 
11. A system comprising:
a tunable bulk acoustic wave (BAW) resonator having:
a first electrode;
a second electrode; and
a piezoelectric layer between the first electrode and the second electrode;
a Bragg mirror having:
a metal layer; and
a dielectric layer between the metal layer and either the first electrode or the second electrode; and
an oscillator circuit coupled to the first electrode and the second electrode, wherein the tunable BAW resonator is configured to apply a radio-frequency (RF) signal to the metal layer of the Bragg mirror.