US 12,131,930 B2
Inspection system
Asaf Schlezinger, Modi'in (IL); and Markus J. Stopper, Voerstetten (DE)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Appl. No. 17/799,251
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Mar. 2, 2021, PCT No. PCT/US2021/020410
§ 371(c)(1), (2) Date Aug. 11, 2022,
PCT Pub. No. WO2021/202029, PCT Pub. Date Oct. 7, 2021.
Claims priority of provisional application 63/004,286, filed on Apr. 2, 2020.
Prior Publication US 2023/0075394 A1, Mar. 9, 2023
Int. Cl. H01L 21/67 (2006.01); B65G 15/12 (2006.01); B65G 47/64 (2006.01); B65G 49/06 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67288 (2013.01) [B65G 15/12 (2013.01); B65G 47/647 (2013.01); B65G 49/067 (2013.01); H01L 21/67271 (2013.01); H01L 21/67706 (2013.01); H01L 21/67715 (2013.01); H01L 21/67718 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A system for inspecting a rectangular substrate having a width between about 175 mm and about 250 mm, comprising:
one or more metrology stations configured to inspect the rectangular substrate; and
a conveyor system configured to transport the rectangular substrate while the one or more metrology stations inspect the rectangular substrate, comprising:
a conveyor inspection system comprising:
a moveable conveyor configured to rotate from a first orientation to a second orientation; and
a rapid conveyor disposed at an angle to the moveable conveyor and below the moveable conveyor, the rapid conveyor configured to lift the rectangular substrate off of the moveable conveyor as the moveable conveyor is rotating to the second orientation;
a first conveyor apparatus; and
a second conveyor apparatus, each of the conveyor inspection system, the first conveyor apparatus, and the second conveyor apparatus comprising one or more conveyor elements comprising:
a first conveyor belt and a second conveyor belt parallel to the first conveyor belt, wherein the first conveyor belt and the second conveyor belt are configured to transport the rectangular substrate having the width between about 175 mm to about 250 mm in a direction of travel while the width of the rectangular substrate is orthogonal to the direction of travel, and the first conveyor belt and the second conveyor belt are spaced apart by a belt separation pitch between 90 mm and 150 mm.