US 12,131,925 B2
Substrate mapping device, method of mapping by the device, and method of teaching the mapping
Masaya Yoshida, Kobe (JP); Shinya Kitano, Kobe (JP); Hiroyuki Okada, Kobe (JP); and Ippei Shimizu, Kobe (JP)
Assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe (JP)
Appl. No. 17/622,238
Filed by Kawasaki Jukogyo Kabushiki Kaisha, Kobe (JP)
PCT Filed Apr. 3, 2020, PCT No. PCT/JP2020/015375
§ 371(c)(1), (2) Date Dec. 23, 2021,
PCT Pub. No. WO2020/261698, PCT Pub. Date Dec. 30, 2020.
Claims priority of application No. 2019-119637 (JP), filed on Jun. 27, 2019.
Prior Publication US 2022/0351994 A1, Nov. 3, 2022
Int. Cl. H01L 21/67 (2006.01); G01B 11/25 (2006.01); G05B 19/421 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01); B25J 19/02 (2006.01)
CPC H01L 21/67259 (2013.01) [G01B 11/2518 (2013.01); G05B 19/421 (2013.01); H01L 21/68707 (2013.01); B25J 11/0095 (2013.01); B25J 19/021 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A substrate mapping device configured to map a plurality of substrates inside a container, that is inclined, where the substrates are accommodated so as to be arrayed in a given arrayed direction, comprising:
a hand that includes a mapping sensor configured to detect a state of the substrate;
a manipulator that is connected to the hand, the manipulator configured to move the mapping sensor; and
control circuitry configured to control the manipulator to move the mapping sensor along a mapping course,
wherein the control circuitry sets a first mapping position that is a lowermost slot of the container and a second mapping position that is an uppermost slot of the container, and sets the mapping course to be a straight-line moving path on which the hand moves in a straight line, that is inclined relative to a front and rear direction of the container, from the first mapping position to the second mapping position.