US 12,131,920 B2
Laser light source and a laser crystallization apparatus including the same
Kyong Sik Choi, Asan-si (KR); Dong Hoon Shin, Cheonan-si (KR); Hoon Chul Ryoo, Cheonan-si (KR); Kyeong Mok Kim, Cheonan-si (KR); Jae-Woong Moon, Asan-si (KR); Kyong Ho Park, Paju-si (KR); Ki Hwan Seok, Pohang-si (KR); Myoung Seok Son, Yongin-si (KR); and Hong Ro Lee, Seongnam-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Apr. 26, 2023, as Appl. No. 18/139,414.
Application 18/139,414 is a continuation of application No. 16/874,198, filed on May 14, 2020, granted, now 11,705,348.
Claims priority of application No. 10-2019-0104692 (KR), filed on Aug. 26, 2019.
Prior Publication US 2023/0260809 A1, Aug. 17, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01S 5/00 (2006.01)
CPC H01L 21/67115 (2013.01) [H01L 21/02675 (2013.01); H01S 5/0071 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer,
the lens unit includes a first surface and a second surface,
the first surface is disposed between the airtight container and the second surface, and
the first surface of the lens unit of the first resonance mirror is spiral.