US 12,131,884 B2
Pulse and bias synchronization methods and systems
Mariusz Oldziej, Avon, NY (US); Aaron Radomski, Conesus, NY (US); Aaron Burry, Ontario, NY (US); and Michael Kirk, Bloomfield, NY (US)
Assigned to MKS Instruments, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on Dec. 20, 2022, as Appl. No. 18/084,696.
Claims priority of provisional application 63/298,825, filed on Jan. 12, 2022.
Prior Publication US 2023/0223235 A1, Jul. 13, 2023
Int. Cl. H03H 11/28 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32146 (2013.01) [H03H 11/28 (2013.01); H01J 2237/24507 (2013.01); H01J 2237/334 (2013.01)] 31 Claims
OG exemplary drawing
 
1. A radio frequency (RF) generator comprising:
a RF power source configured to output an RF power signal; and
a controller coupled to the RF power source, the controller configured to:
generate a pulse to modulate the RF power signal of the RF power source, the pulse including one or more state transitions;
receive a sync signal indicative of one or more operating characteristics or parameters of an other RF generator; and
adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received sync signal,
wherein the controller includes a sync monitor module configured to receive the sync signal and generate a sync active signal based on the defined phase of the sync signal.