US 12,131,882 B2
Charged particle beam device
Shuntaro Ito, Tokyo (JP); and Hiromi Mise, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/595,807
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed May 29, 2019, PCT No. PCT/JP2019/021175
§ 371(c)(1), (2) Date Nov. 24, 2021,
PCT Pub. No. WO2020/240719, PCT Pub. Date Dec. 3, 2020.
Prior Publication US 2022/0230840 A1, Jul. 21, 2022
Int. Cl. H01J 37/24 (2006.01)
CPC H01J 37/24 (2013.01) [H01J 2237/2485 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A charged particle beam device, comprising:
a charged particle beam device main body;
a computer configured to control the charged particle beam device main body, including at least a CPU and a DRAM, and including software for controlling the charged particle beam device main body;
a monitoring unit configured to monitor a resource usage status in the computer;
an allocation availability determination unit configured to determine whether or not a resource for executing processing required by the software is allocatable in the computer according to a monitoring result of the monitoring unit;
a notification unit configured to notify, when the determination of the allocation availability determination unit is negative, information indicating that the determination is negative; and
a restriction unit configured to restrict, when the determination of the allocation availability determination unit is negative, a usage amount of the resource of the computer to be used by the software;
wherein the restriction unit is configured to, as the restriction, change a size of an observation image imaged and observed by the charged particle beam device main body and a capturing interval.