US 12,130,468 B2
Method of manufacture of a capillary for a hollow-core photonic crystal fiber
Hendrik Sabert, London (GB); and Paulus Antonius Andreas Teunissen, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Apr. 13, 2022, as Appl. No. 17/719,508.
Application 17/719,508 is a continuation of application No. 17/088,201, filed on Nov. 3, 2020, granted, now 11,333,825.
Claims priority of application No. 19207624 (EP), filed on Nov. 7, 2019; and application No. 19213709 (EP), filed on Dec. 5, 2019.
Prior Publication US 2022/0236479 A1, Jul. 28, 2022
Int. Cl. C03B 37/012 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); G02B 6/02 (2006.01)
CPC G02B 6/02328 (2013.01) [C03B 37/0122 (2013.01); C03C 15/00 (2013.01); C03C 25/68 (2013.01); G02B 6/02347 (2013.01); G02B 6/02357 (2013.01); G02B 6/02376 (2013.01); C03B 2203/16 (2013.01); C03B 2203/42 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber, the method comprising:
obtaining a capillary having a capillary wall with a wall thickness;
chemically etching the capillary wall to reduce the wall thickness of the capillary wall; and
during performance of the etching, locally varying a control parameter along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching, so as to control the etched wall thickness of the capillary wall along the capillary length.