US 12,130,425 B2
Systems and apparatus for micromirror designs with electrode contact
William Craig McDonald, Allen, TX (US); and Ryan Patrick Savage, Richardson, TX (US)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by Texas Instruments Incorporated, Dallas, TX (US)
Filed on Sep. 3, 2021, as Appl. No. 17/466,775.
Prior Publication US 2023/0070502 A1, Mar. 9, 2023
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G09G 3/34 (2006.01)
CPC G02B 26/0841 (2013.01) [B81B 3/0035 (2013.01); G09G 3/346 (2013.01); B81B 2201/042 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a mirror;
a mirror via coupled to the mirror;
a hinge layer coupled to the mirror via, the hinge layer comprising a springtip associated with a side of the mirror, the springtip associated with a first terminal; and
an electrode associated with the side of the mirror, the electrode having a dielectric coating configured to contact the springtip, the electrode associated with a second terminal different than the first terminal.