US 12,130,303 B2
Mems device, electronic apparatus, and vehicle
Fumiya Ito, Chikuma (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Nov. 30, 2023, as Appl. No. 18/524,231.
Application 17/236,244 is a division of application No. 16/111,314, filed on Aug. 24, 2018, granted, now 11,061,050, issued on Jul. 13, 2021.
Application 18/524,231 is a continuation of application No. 18/162,874, filed on Feb. 1, 2023, granted, now 11,867,716.
Application 18/162,874 is a continuation of application No. 17/236,244, filed on Apr. 21, 2021, granted, now 11,604,208, issued on Mar. 14, 2023.
Claims priority of application No. 2017-162015 (JP), filed on Aug. 25, 2017.
Prior Publication US 2024/0094239 A1, Mar. 21, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01P 15/135 (2006.01); B81B 7/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01)
CPC G01P 15/135 (2013.01) [B81B 7/0016 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0831 (2013.01); G01P 2015/0871 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A MEMS device comprising:
three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a base;
a fixed electrode provided on the base;
a movable member facing the base along the Z-axis and supported by the base with a first gap therebetween; and
a wall spaced apart from the movable member along the Y-axis by a second gap in a plan view;
wherein the wall includes an abutment portion facing the movable member along the Y-axis,
in the plan view, an outer edge of the movable member facing the abutment portion is planar,
a hollow exists in the abutment portion,
the hollow includes a first hole and a second hole,
the first hole is arranged closer to the movable member than the second hole along the Y-axis in the plan view,
the abutment portion includes a narrow width portion between the movable member and the first hole in the plan view, and
a width along the Y-axis of the narrow width portion is narrower than a width along the Y-axis of the wall.