US 12,130,178 B2
Easily adjustable optical emission spectrometer
André Peters, Kleve (DE); and Rainer Simons, Kranenburg (DE)
Assigned to HITACHI HIGH-TECH ANALYTICAL SCIENCE GMBH, Uedem (DE)
Appl. No. 17/774,405
Filed by Hitachi High-Tech Analytical Science GmbH, Uedem (DE)
PCT Filed Nov. 4, 2020, PCT No. PCT/EP2020/080992
§ 371(c)(1), (2) Date May 4, 2022,
PCT Pub. No. WO2021/089639, PCT Pub. Date May 14, 2021.
Claims priority of application No. 19207192 (EP), filed on Nov. 5, 2019.
Prior Publication US 2022/0390279 A1, Dec. 8, 2022
Int. Cl. G01J 3/18 (2006.01); G01J 3/02 (2006.01); G01J 3/36 (2006.01)
CPC G01J 3/0286 (2013.01) [G01J 3/0291 (2013.01); G01J 3/18 (2013.01); G01J 3/36 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An optical emission spectrometer comprising:
a plasma stand to establish a light emitting plasma from sample material;
an optical system to measure the spectrum of the light emitted by the plasma being characteristic to the sample material, where the optical system comprises at least one light entrance aperture, at least one diffraction grating to diffract the light coming from the plasma into a spectrum, and one or more detectors to measure the spectrum of the light, wherein the plasma stand and the optical system are directly and fixedly mounted on respectively a plasma stand flange and an optical system flange which are directly and fixedly connected to each other; and
an analyzing unit adapted to analyze the measured spectrum and to compensate for a drift of the spectrum relative to the detector potentially caused by heat transferred from the plasma stand to the optical system considering the thermal expansion of the optical system.