CPC G01C 19/5747 (2013.01) | 10 Claims |
1. A micro-electro-mechanical system (MEMS) gyroscope for three-axis detection, comprising:
a substrate;
a sensing unit elastically connected with the substrate; and
a driving unit coupled with the sensing unit and driving the sensing unit to move;
wherein the substrate is in a shape of a rectangle; the substrate comprises four anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures; and an avoiding space is formed between each two adjacent coupling structures;
wherein the driving unit comprises two driving pieces located at inner sides of two opposite sides of the substrate; two ends of each of the two driving pieces are separately elastically connected with adjacent coupling structures; the two driving pieces are symmetrically arranged and are frame-shaped;
wherein the sensing unit comprises four X and Y mass blocks, two Z mass blocks, and two decoupling mass blocks; each of the four X and Y mass blocks is arranged in a corresponding avoiding space; the four X and Y mass blocks are respectively elastically connected with adjacent coupling structures to form a rectangular frame; each of the Z mass blocks is elastically connected with a corresponding driving piece and is arranged in the corresponding driving piece; each of the two decoupling mass blocks is elastically connected with a corresponding Z mass block and is arranged in the corresponding Z mass block; the two decoupling mass blocks are elastically connected with each other.
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