US 12,130,139 B2
MEMS gyroscope for three-axis detection
Zhao Ma, Shenzhen (CN); Zhan Zhan, Shenzhen (CN); Xiao Kan, Shenzhen (CN); Shan Yang, Shenzhen (CN); Shitao Yan, Shenzhen (CN); Hongtao Peng, Shenzhen (CN); Yang Li, Shenzhen (CN); Kahkeen Lai, Singapore (SG); and Veronica Tan, Singapore (SG)
Assigned to AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan (CN)
Filed by AAC Kaitai Technologies (Wuhan) CO., LTD, Hubei (CN)
Filed on Jul. 27, 2022, as Appl. No. 17/875,387.
Claims priority of application No. 202220361609.1 (CN), filed on Feb. 22, 2022.
Prior Publication US 2023/0266125 A1, Aug. 24, 2023
Int. Cl. G01C 19/5747 (2012.01)
CPC G01C 19/5747 (2013.01) 10 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system (MEMS) gyroscope for three-axis detection, comprising:
a substrate;
a sensing unit elastically connected with the substrate; and
a driving unit coupled with the sensing unit and driving the sensing unit to move;
wherein the substrate is in a shape of a rectangle; the substrate comprises four anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures; and an avoiding space is formed between each two adjacent coupling structures;
wherein the driving unit comprises two driving pieces located at inner sides of two opposite sides of the substrate; two ends of each of the two driving pieces are separately elastically connected with adjacent coupling structures; the two driving pieces are symmetrically arranged and are frame-shaped;
wherein the sensing unit comprises four X and Y mass blocks, two Z mass blocks, and two decoupling mass blocks; each of the four X and Y mass blocks is arranged in a corresponding avoiding space; the four X and Y mass blocks are respectively elastically connected with adjacent coupling structures to form a rectangular frame; each of the Z mass blocks is elastically connected with a corresponding driving piece and is arranged in the corresponding driving piece; each of the two decoupling mass blocks is elastically connected with a corresponding Z mass block and is arranged in the corresponding Z mass block; the two decoupling mass blocks are elastically connected with each other.