US 12,130,128 B2
Device and method for measuring curvature radius
Kai Liang, Shenzhen (CN); Xiaobo Zhang, Shenzhen (CN); and Zhengkai Chang, Shenzhen (CN)
Assigned to SHENZHEN SUPRO INSTRUMENTS LIMITED, Guangdong (CN)
Appl. No. 17/797,625
Filed by SHENZHEN SUPRO INSTRUMENTS LIMITED, Guangdong (CN)
PCT Filed Jan. 15, 2020, PCT No. PCT/CN2020/072313
§ 371(c)(1), (2) Date Aug. 4, 2022,
PCT Pub. No. WO2021/128517, PCT Pub. Date Jul. 1, 2021.
Claims priority of application No. 201911338140.9 (CN), filed on Dec. 23, 2019; and application No. 201922329358.X (CN), filed on Dec. 23, 2019.
Prior Publication US 2023/0054161 A1, Feb. 23, 2023
Int. Cl. G01B 11/255 (2006.01)
CPC G01B 11/255 (2013.01) 15 Claims
OG exemplary drawing
 
1. A device for measuring a curvature radius, the device comprising:
a sample stage, configured to support a sample to be measured;
a diffracted light array generation module, configured to generate and emit a diffracted light array to the sample; and
a detection and analysis module, configured to receive a reflected light array emitted from the sample and to obtain a curvature radius of the sample according to a dimension of a received reflected light array,
wherein the detection and analysis module comprises:
a sensor imaging screen, configured to receive the reflected light array emitted from the sample and to convert an optical signal of the reflected light array into an electrical signal; and
an analysis unit, electrically connected to the sensor imaging screen and configured to obtain the curvature radius of the sample according to the electrical signal:
wherein an emitting direction of the diffracted light array is perpendicular to the sample stage, and the curvature radius of the sample is obtained according to a following formula:

OG Complex Work Unit Math
wherein,
R denotes the curvature radius of the sample;
S denotes a length of a first path of the diffracted light array from the diffracted light array generation module to a surface of the sample;
H denotes a length of a second path of the reflected light array from the surface of the sample to the sensor imaging screen;
β denotes a divergence angle of the diffracted light array; and
D denotes a distance between an actual landing point and a preset landing point of the reflected light array on a detector, and D>0.