US 12,129,542 B2
Vacuum deposition facility and method for coating a substrate with transverse repartition chamber
Sergio Pace, Jodoigne (BE); Bruno Schmitz, Nandrin (BE); Didier Marneffe, Engis (BE); and Eric Silberberg, Haltinne (BE)
Assigned to ArcelorMittal, Luxembourg (LU)
Appl. No. 16/972,176
Filed by ArcelorMittal, Luxembourg (LU)
PCT Filed Jun. 11, 2019, PCT No. PCT/IB2019/054860
§ 371(c)(1), (2) Date Dec. 4, 2020,
PCT Pub. No. WO2019/239314, PCT Pub. Date Dec. 19, 2019.
Claims priority of application No. PCT/IB2018/054419 (WO), filed on Jun. 15, 2018.
Prior Publication US 2021/0238734 A1, Aug. 5, 2021
Int. Cl. C23C 14/56 (2006.01); C23C 14/24 (2006.01)
CPC C23C 14/562 (2013.01) [C23C 14/243 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A vacuum deposition facility for continuously depositing coatings formed from a metal or a metal alloy on a substrate moving in a running direction, the vacuum deposition facility comprising:
an evaporation crucible suited to supply a vapor of the metal or the metal alloy and including an evaporation pipe,
a deposition chamber suited to have the substrate run through along a given path; and
a vapor jet coater linking the evaporation pipe to the deposition chamber, the vapor jet coater including:
a repartition chamber extending from the evaporation pipe in a direction across a width of the given path and transversely to a direction along a length of the evaporation pipe, the repartition chamber including at least one reheater positioned within the repartition chamber;
the repartition chamber linked to a base opening of a vapor outlet orifice in the direction along the length of the evaporation pipe, the vapor outlet orifice including the base opening, a top opening, the vapor capable of exiting the deposition chamber through the top opening, and two sides linking the base opening to the top opening, the two sides of the vapor outlet orifice converge toward each other in a direction facing the top opening;
wherein the repartition chamber is in a form of a tube extending longitudinally across the width of the given path.