US 12,129,455 B2
Cleaning solution for temporary adhesive for substrates, substrate cleaning method, and cleaning method for support or substrate
Michihiro Sugo, Annaka (JP); Masahito Tanabe, Annaka (JP); and Shohei Tagami, Annaka (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Appl. No. 17/603,242
Filed by Shin-Etsu Chemical Co., Ltd., Tokyo (JP)
PCT Filed May 20, 2020, PCT No. PCT/JP2020/019988
§ 371(c)(1), (2) Date Oct. 12, 2021,
PCT Pub. No. WO2020/235606, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 2019-096056 (JP), filed on May 22, 2019.
Prior Publication US 2022/0195352 A1, Jun. 23, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C11D 3/24 (2006.01); B08B 3/08 (2006.01); C11D 3/20 (2006.01); C11D 3/30 (2006.01); C11D 3/34 (2006.01); C11D 3/43 (2006.01); C11D 3/44 (2006.01); C11D 7/26 (2006.01); C11D 7/28 (2006.01); C11D 7/50 (2006.01); H01L 21/02 (2006.01)
CPC C11D 7/5009 (2013.01) [B08B 3/08 (2013.01); C11D 3/2068 (2013.01); C11D 3/2072 (2013.01); C11D 3/2093 (2013.01); C11D 3/30 (2013.01); C11D 7/263 (2013.01); C11D 7/264 (2013.01); C11D 7/266 (2013.01); C11D 7/28 (2013.01); C11D 7/5013 (2013.01); C11D 7/5022 (2013.01); H01L 21/02079 (2013.01); B08B 2220/01 (2013.01); C11D 2111/14 (2024.01)] 4 Claims
OG exemplary drawing
 
1. A cleaning solution for temporary adhesive for substrates, the cleaning solution comprising:
tetrabutylammonium fluoride; dimethyl sulfoxide; and a liquid compound having a solubility parameter of 8.0 or more and 10.0 or less and having a heteroatom, wherein
the tetrabutylammonium fluoride is contained at a content of 1 mass % or more and 15 mass % or less in 100 mass % of a total of the tetrabutylammonium fluoride, the dimethyl sulfoxide, and the liquid compound,
the dimethyl sulfoxide is contained at a content of 5 mass % or more and 30 mass % or less in 100 mass % of a total of the tetrabutylammonium fluoride, the dimethyl sulfoxide, and the liquid compound, and
the liquid compound comprises propylene glycol monomethyl ether acetate or butyl acetate.