US 12,128,664 B2
Affixing method and affixing apparatus
Yohei Masuda, Tokyo (JP); and Ye Chen, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jul. 7, 2022, as Appl. No. 17/811,204.
Claims priority of application No. 2021-116770 (JP), filed on Jul. 14, 2021.
Prior Publication US 2023/0014530 A1, Jan. 19, 2023
Int. Cl. B32B 38/18 (2006.01); B32B 37/10 (2006.01); B32B 37/18 (2006.01); B32B 41/00 (2006.01); H01L 21/67 (2006.01)
CPC B32B 38/1858 (2013.01) [B32B 37/10 (2013.01); B32B 37/18 (2013.01); B32B 41/00 (2013.01); H01L 21/67132 (2013.01); B32B 2309/68 (2013.01); B32B 2457/14 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An affixing method of affixing a tape to a wafer, comprising:
a holding step of holding the wafer under suction on a suction table by channeling air through a first suction channel;
a positioning step of, before or after the holding step, positioning the tape in facing relation to the wafer on the suction table and positioning a tape affixing roller in facing relation to the wafer with the tape interposed therebetween;
a pressing step of, after the holding step and the positioning step, pressing a portion of the tape against the wafer with the tape affixing roller and pressing the wafer against the suction table with the tape affixing roller;
an evacuating step of, after the pressing step, evacuating a vacuum chamber that houses therein the suction table holding the wafer under suction thereon and the tape affixing roller through a second suction channel, while the tape affixing roller is pressing the portion of the tape against the wafer; and
an affixing step of, after the evacuating step and when the suction table and the tape affixing roller are under vacuum in the vacuum chamber, causing the tape affixing roller to roll on the tape to affix the tape to the wafer while the tape affixing roller is pressing the wafer.