US 12,128,446 B1
High speed substrate sorter
Asaf Schlezinger, Modi'in (IL); and Markus J. Stopper, Voerstetten (DE)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 30, 2023, as Appl. No. 18/217,333.
Int. Cl. B07B 13/00 (2006.01); B25J 11/00 (2006.01); B25J 15/06 (2006.01)
CPC B07B 13/003 (2013.01) [B25J 11/0095 (2013.01); B25J 15/0616 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate sorter comprising:
an annular gripper comprising a rotator and a plurality of vacuum applicators concyclically disposed around an axis;
a carrier operable to move a substrate towards the rotator into a loading region below the rotator; and
an actuator coupled with the annular gripper and operable to rotate the rotator about the axis relative to the plurality of vacuum applicators while one or more of the plurality of vacuum applicators hold the substrate against the rotator.