CPC H10B 12/09 (2023.02) [H01L 21/84 (2013.01); H01L 23/5286 (2013.01); H01L 27/1203 (2013.01); H01L 2224/05548 (2013.01); H01L 2224/05552 (2013.01); H01L 2224/05567 (2013.01); H01L 2224/05571 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/0002 (2013.01)] |
AS A RESULT OF REEXAMINATION, IT HAS BEEN DETERMINED THAT: |
The patentability of claim 12 is confirmed. |
Claims 1-11 and 13-15 are cancelled. |
12. The method according to claim 7, wherein the main metal pattern is formed by sequentially stacking a copper layer, a diffusion barrier layer, and a gold layer, wherein the diffusion barrier layer comprises a metal layer for preventing interaction of the copper layer and the gold layer.
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