US 12,457,903 B2
Piezoelectric vibration element, piezoelectric resonator unit, and electronic device
Yuuki Ooi, Nagaokakyo (JP); Norio Iwashita, Nagaokakyo (JP); and Hayato Sasaki, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on May 20, 2022, as Appl. No. 17/749,870.
Application 17/749,870 is a continuation of application No. PCT/JP2020/028241, filed on Jul. 21, 2020.
Claims priority of application No. 2019-238993 (JP), filed on Dec. 27, 2019.
Prior Publication US 2022/0278268 A1, Sep. 1, 2022
Int. Cl. H01L 41/047 (2006.01); H01L 41/335 (2013.01); H03H 9/19 (2006.01); H10N 30/085 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01)
CPC H10N 30/872 (2023.02) [H03H 9/19 (2013.01); H10N 30/085 (2023.02); H10N 30/853 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A piezoelectric vibration element, comprising:
a piezoelectric piece including a main surface;
an excitation electrode disposed on the main surface of the piezoelectric piece; and
a connection electrode disposed on the main surface of the piezoelectric piece and electrically connected to the excitation electrode,
wherein the piezoelectric piece has a through-hole in an area between the excitation electrode and the connection electrode in a plan view of the main surface of the piezoelectric piece,
wherein an internal wall of the through-hole located closer to the excitation electrode has at least four slopes; and
wherein a thickness of the piezoelectric piece at a portion where the excitation electrode is disposed is larger than a thickness of the piezoelectric piece in an area that includes the through-hole and is between the excitation electrode and the connection electrode.