US 12,457,805 B2
Display device, method of manufacturing the same and tiled display device including the same
Yong Hoon Kwon, Suwon-si (KR); Mi Sun Kim, Hwaseong-si (KR); Dong Sung Lee, Suwon-si (KR); and Se Hun Choi, Asan-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Nov. 9, 2022, as Appl. No. 17/983,618.
Claims priority of application No. 10-2022-0037251 (KR), filed on Mar. 25, 2022.
Prior Publication US 2023/0307462 A1, Sep. 28, 2023
Int. Cl. H10D 86/60 (2025.01); H01L 23/00 (2006.01); H01L 25/16 (2023.01); H10D 86/01 (2025.01); H10D 86/40 (2025.01)
CPC H10D 86/60 (2025.01) [H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 25/167 (2013.01); H10D 86/0212 (2025.01); H10D 86/441 (2025.01); H01L 24/16 (2013.01); H01L 2224/03019 (2013.01); H01L 2224/03612 (2013.01); H01L 2224/05571 (2013.01); H01L 2224/05573 (2013.01); H01L 2224/16237 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A display device comprising:
a substrate;
a first metal layer disposed on the substrate;
a first barrier insulating layer disposed on the first metal layer;
an etching control layer disposed on the first barrier insulating layer;
a first contact hole passing through the substrate, the first barrier insulating layer, and the etching control layer;
a second barrier insulating layer disposed on the etching control layer and comprising a second contact hole;
a fan-out line disposed on the second barrier insulating layer and included in a second metal layer;
a pad part inserted into the second contact hole and included in the second metal layer, the pad part being integral with the fan-out line;
a display layer disposed on the fan-out line; and
a flexible film disposed under the substrate and inserted into the first contact hole to be electrically connected to the pad part,
wherein the first metal layer comprises an etching mark adjacent to the first contact hole.