US 12,457,776 B2
Isolator
Masaki Yamada, Oita Oita (JP)
Assigned to Kabushiki Kaisha Toshiba, Kawasaki (JP); and Toshiba Electronic Devices & Storage Corporation, Kawasaki (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP); and TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION, Tokyo (JP)
Filed on Dec. 17, 2021, as Appl. No. 17/554,772.
Claims priority of application No. 2021-070841 (JP), filed on Apr. 20, 2021.
Prior Publication US 2022/0336580 A1, Oct. 20, 2022
Int. Cl. H01F 27/28 (2006.01); H01F 27/29 (2006.01); H01F 27/32 (2006.01); H10D 62/10 (2025.01)
CPC H10D 62/115 (2025.01) [H01F 27/29 (2013.01); H01F 27/323 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An isolator, comprising:
a first conductor;
a second conductor facing the first conductor;
a first insulating film provided between the first conductor and the second conductor, the first insulating film having a first film thickness in a first direction directed from the first conductor toward the second conductor, the first insulating film including silicon, oxygen, and nitrogen;
a second insulating film provided between the first conductor and the first insulating film, the second insulating film having a second film thickness in the first direction, the second film thickness being less than the first film thickness of the first insulating film, the second insulating film including silicon and oxygen, the second insulating film including no nitrogen, or the second insulating film further including nitrogen of a smaller composition ratio than a nitrogen composition ratio in the first insulating film;
a third insulating film provided between the first conductor and the second insulating film, the third insulating film having a third film thickness in the first direction, the third film thickness being less than the first film thickness of the first insulating film, the third insulating film having a different composition from the compositions of the first and second insulating films;
a substrate arranged with the first and second conductors in the first direction, the first conductor being provided between the substrate and the second conductor;
a fourth insulating film provided between the substrate and the first conductor; and
a fifth insulating film provided between the third insulating film and the fourth insulating film,
the first conductor being provided in the fifth insulating film.