| CPC H04B 1/66 (2013.01) [H01B 1/124 (2013.01); H01B 13/32 (2013.01); H04B 1/03 (2013.01); Y10T 29/49165 (2015.01)] | 17 Claims |

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1. A manufacturing method of an electronic device, comprising:
providing a substrate;
forming a first opening so that the first opening penetrates the substrate; and
forming a polymer layer in the first opening, wherein the polymer layer is in contact with a sidewall of the substrate at the first opening;
forming a first conductive layer pattern on a surface of the substrate;
forming a second conductive layer pattern on another surface of the substrate, wherein the another surface is opposite to the surface; and
forming a second opening in the polymer layer, wherein the second opening exposes the second conductive layer pattern;
wherein before forming the second opening in the polymer layer, the manufacturing method further comprises:
forming a dielectric layer on the surface of the substrate to cover the first conductive layer pattern;
forming a conductive layer pattern on the dielectric layer so that the conductive layer pattern is electrically coupled to the first conductive layer pattern.
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