US 12,456,639 B2
Pick-up structure for memory device and manufacturing method thereof
Tsung-Wei Lin, Taichung (TW); Chun-Yen Liao, Taichung (TW); Kun-Che Wu, Taichung (TW); Cheng-Ta Yang, Taichung (TW); and Chun-Sheng Wu, Taichung (TW)
Assigned to WINDBOND ELECTRONICS CORP., Taichung (TW)
Filed by Winbond Electronics Corp., Taichung (TW)
Filed on May 23, 2022, as Appl. No. 17/751,130.
Claims priority of application No. 110127186 (TW), filed on Jul. 23, 2021.
Prior Publication US 2023/0022941 A1, Jan. 26, 2023
Int. Cl. H01L 21/683 (2006.01); H01L 21/033 (2006.01); H01L 21/311 (2006.01); H01L 21/67 (2006.01); H01L 21/768 (2006.01); H10B 41/50 (2023.01); H10B 43/50 (2023.01)
CPC H01L 21/6831 (2013.01) [H01L 21/0337 (2013.01); H01L 21/31144 (2013.01); H01L 21/76816 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A pick-up structure for a memory device, comprising:
a substrate, having a memory cell region and a peripheral pick-up area adjacent to the memory cell area; and
a plurality of pick-up electrode strips, parallel to a first direction, extending along a second direction that is different from the first direction, and arranged on the substrate, wherein each of the pick-up electrode strips comprises:
a main part, deposited in the peripheral pick-up area, wherein the main part is defined by a plurality of fork-shaped patterns in a first mask layer; and
an extension part, extending from the main part to the memory cell region, wherein the extension part has a width less than a width of the main part and the extension part has a side wall surface aligned with a side wall surface of the main part;
wherein the first mask layer, a sacrificial material layer, and a second mask layer are sequentially formed on the substrate;
wherein a first pattern and a second pattern are formed in the second mask layer;
wherein the first pattern corresponds to the memory cell region and comprises a plurality of first strip patterns and a plurality of second strip patterns parallel with one another, and the second pattern corresponds to the peripheral pick-up region and comprises a plurality of fork-shaped patterns connected to the plurality of second strip patterns.