US 12,456,638 B2
Methods and systems for temperature control for a substrate
Nicholas Michael Bergantz, San Jose, CA (US); Jeffrey Hudgens, San Francisco, CA (US); Doug McAllister, San Ramon, CA (US); and Helder Lee, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on May 16, 2024, as Appl. No. 18/666,686.
Application 18/045,119 is a division of application No. 16/994,413, filed on Aug. 14, 2020, granted, now 11,469,123, issued on Oct. 11, 2022.
Application 18/666,686 is a continuation of application No. 18/045,119, filed on Oct. 7, 2022, granted, now 12,014,944.
Claims priority of provisional application 62/888,931, filed on Aug. 19, 2019.
Prior Publication US 2024/0304478 A1, Sep. 12, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67265 (2013.01) [H01L 21/67356 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system comprising:
a factory interface comprising one or more robot arms;
a load port connected to the factory interface; and
a system controller operatively connected to the one or more robot arms, wherein the system controller is to:
responsive to detecting that a container is received at the load port, determine a type of parts of the system for storage at the container;
identify, from a storage medium, one or more mapping patterns associated with the determined type of parts;
cause a detection system of the one or more robot arms to be moved according to the identified one or more mapping patterns to detect one or more parts stored by the container;
determine, based on the movement of the one or more robot arms according to the identified one or more mapping patterns, a mapping of the storage container, wherein the mapping of the storage container indicates regions of the container that stores one or more detected parts and a position of each of the one or more detected parts stored at a respective region; and
record, in the storage medium, the mapping of the container; and
based on the determined mapping, causing the one or more robot arms to perform at least one of:
removing at least one of the one or more detected parts from the container, or
placing an additional part in the container.