US 12,456,635 B2
Rotatable electrochemical etching cell
Xuewu Liu, Sugar Land, TX (US); and Gauri Bhave, Richmond, TX (US)
Assigned to The Methodist Hospital, Houston, TX (US)
Filed by The Methodist Hospital, Houston, TX (US)
Filed on Dec. 13, 2024, as Appl. No. 18/980,720.
Application 18/980,720 is a continuation of application No. PCT/US2023/033412, filed on Sep. 21, 2023.
Claims priority of provisional application 63/409,129, filed on Sep. 22, 2022.
Prior Publication US 2025/0112059 A1, Apr. 3, 2025
Int. Cl. C02F 1/469 (2023.01); B01D 61/44 (2006.01); B01D 61/46 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67086 (2013.01) 16 Claims
OG exemplary drawing
 
1. A reaction chamber comprising:
a mesh cathode or a porous cathode, a first anode, a second anode, and a reaction chamber body,
wherein the reaction chamber body is hollow and has an interior surface, an exterior surface, a first opening with a first lip, and a second opening with a second lip,
wherein the mesh cathode or the porous cathode is positioned between the first opening and the second opening and the mesh cathode or the porous cathode is substantially parallel to the first lip,
wherein the first anode is reversibly fastened to the first lip by a first fastener and the second anode is reversibly fastened to the second lip by a second fastener,
wherein a first semiconductor wafer is positioned between the first lip and the first anode.