US 12,456,634 B2
Substrate processing apparatus
Hajime Nishide, Kyoto (JP); Kwichang Kang, Kyoto (JP); and Takao Matsumoto, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Jan. 23, 2024, as Appl. No. 18/420,454.
Application 18/420,454 is a continuation of application No. 17/270,964, granted, now 11,915,945, previously published as PCT/JP2019/032884, filed on Aug. 22, 2019.
Claims priority of application No. 2018-177591 (JP), filed on Sep. 21, 2018.
Prior Publication US 2024/0194497 A1, Jun. 13, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); B01D 46/00 (2022.01); B08B 15/02 (2006.01); H01L 21/304 (2006.01)
CPC H01L 21/67051 (2013.01) [B01D 46/0041 (2013.01); B08B 15/02 (2013.01); H01L 21/67178 (2013.01); H01L 21/6719 (2013.01); H01L 21/304 (2013.01); H01L 21/67017 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate processing apparatus, comprising:
a plurality of processing parts arrayed in an up-and-down direction, each of which is capable of supplying a plurality of kinds of processing fluids to a substrate;
a plurality of exhaust pipes extending upward from said plurality of processing parts, into which exhaust gases from said plurality of processing parts flow, respectively, each of said plurality of exhaust pipes having an upper end portion and a lower end portion;
two or more collecting pipes arranged above said plurality of processing parts, said two or more collecting pipes corresponding to two or more fluid classifications, respectively, into which said plurality of kinds of processing fluids are classified;
a plurality of flow path switching parts which are provided at the upper end portions of said plurality of exhaust pipes, respectively, each of said plurality of flow path switching parts connecting said upper end portion to said two or more collecting pipes and switching a flow path of exhaust gas flowing in said exhaust pipe, among said two or more collecting pipes;
a control part for controlling said plurality of flow path switching parts in accordance with the processing fluids used in said plurality of processing parts; and
a fan filter unit provided above said plurality of processing parts and below said two or more collecting pipes, wherein
said two or more collecting pipes overlap said plurality of processing parts in said up-and-down direction while being stacked in said up-and-down direction, and an intake of air in said fan filter unit is thereby prevented from being blocked by said two or more collecting pipes.