US 12,456,614 B2
Process kits and related methods for processing chambers to facilitate deposition process adjustability
Zhepeng Cong, San Jose, CA (US); Ala Moradian, Sunnyvale, CA (US); Tao Sheng, Santa Clara, CA (US); Nimrod Smith, Cupertino, CA (US); Ashur J. Atanos, San Jose, CA (US); and Vinh N. Tran, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 22, 2022, as Appl. No. 17/871,455.
Claims priority of provisional application 63/346,681, filed on May 27, 2022.
Prior Publication US 2023/0386802 A1, Nov. 30, 2023
Int. Cl. H01J 37/32 (2006.01); C23C 14/56 (2006.01); C23C 16/458 (2006.01); C30B 25/10 (2006.01); C30B 25/12 (2006.01); C30B 25/14 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32834 (2013.01) [C23C 14/564 (2013.01); C23C 16/4585 (2013.01); C30B 25/10 (2013.01); C30B 25/12 (2013.01); C30B 25/14 (2013.01); H01J 37/32477 (2013.01); H01L 21/02057 (2013.01); H01L 21/67051 (2013.01); H01L 21/68735 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A process kit for disposition in a processing chamber applicable for use in substrate manufacturing, the process kit comprising:
a flow guide comprising:
a middle plate having a first side and a second side opposing the first side along a first direction, the first side and the second side being arcuate,
a first flange extending outwardly relative to a third side of the middle plate and outwardly relative to an outer face of the middle plate,
a second flange extending outwardly relative to a fourth side of the middle plate and outwardly relative to the outer face of the middle plate, the fourth side opposing the third side along a second direction that intersects the first direction, and
a rectangular flow opening defined between a first planar inner face of the first flange and a second planar inner face of the second flange,
one or more first openings formed in the middle plate adjacent to the first side, and
one or more second openings formed in the middle plate adjacent to the second side.