| CPC G06T 7/593 (2017.01) [H04N 23/695 (2023.01); G06T 2207/10012 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/30148 (2013.01)] | 16 Claims |
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1. A shape measurement device for acquiring a plurality of surface images while scanning a surface of a plate-shaped measurement object and measuring a shape of the measurement object, the shape measurement device comprising:
a plurality of imaging systems that irradiate the measurement object with parallel light and acquire the surface images;
an imaging system switching mechanism configured to switch the imaging systems;
a stage system that holds the measurement object and adjusts an attitude of the measurement object with respect to the imaging systems; and
a control device that comprises a processor or circuit or computer,
wherein the control device includes:
an attitude adjustment unit that controls the imaging systems and the stage system to scan the surface while adjusting the attitude to obtain a plurality of surface images; and
an image processing unit that generates a restored model of a three-dimensional shape of the measurement object from the plurality of surface images acquired, and
when acquiring the surface image, the attitude adjustment unit adjusts the attitude so that an angle of incidence of the parallel light onto the surface falls within a predetermined range,
wherein the control device switches the imaging system to be used to the imaging system determined in advance based on a correspondence relationship with the measurement object; and
wherein the imaging systems include at least two or more types selected from the group consisting of one for acquiring white interference microscopic images, one for acquiring confocal microscopic images, and one for acquiring images by a photometric stereo method using a polarizing plate.
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