US 12,455,902 B2
Method and device for extracting feature value of time series data
Sang Yeop Kim, Seoul (KR); Jin Woo Park, Seoul (KR); and Tae Kyung Ha, Suwon-si (KR)
Assigned to RTM INC., Seoul (KR)
Appl. No. 18/248,042
Filed by RTM INC., Seoul (KR)
PCT Filed Feb. 24, 2022, PCT No. PCT/KR2022/002734
§ 371(c)(1), (2) Date Apr. 12, 2023,
PCT Pub. No. WO2022/182176, PCT Pub. Date Sep. 1, 2022.
Claims priority of application No. 10-2021-0026328 (KR), filed on Feb. 26, 2021.
Prior Publication US 2023/0367793 A1, Nov. 16, 2023
Int. Cl. G06F 16/28 (2019.01); G06F 16/23 (2019.01); G06F 16/25 (2019.01)
CPC G06F 16/285 (2019.01) [G06F 16/2365 (2019.01); G06F 16/254 (2019.01)] 20 Claims
OG exemplary drawing
 
1. A method for extracting a feature value of time series data performed by a feature value extraction device of time series data, the method comprising:
acquiring, by the feature value extraction device, first time series data for a process in a semiconductor process;
segmenting, by the feature value extraction device, the first time series data into one or more segments according to preset segment types;
if a length of a first time section having a same value in the first time series data is less than a first threshold value:
compressing data of the first time section into data at a first time point included in the first time section; and
determining, in the compressed data, a second time section as a segment of one of the preset segment types based on a slope of the second time section including the first time point;
identifying, by the feature value extraction device, a first feature group of a plurality of preset feature groups mapped to a segment type of a first segment among the one or more segments;
extracting, by the feature value extraction device, a value of at least one item included in the first feature group as a first feature value of the first segment;
acquiring, by the feature value extraction device, a second time series data for said process in the semiconductor process, which is different from the first time series data;
synchronizing, to account for a time shift between the first time series data and the second time series data and by the feature value extraction device, the first segment of the first time series data and a second segment among one or more segments of the second time series data;
extracting, by the feature value extraction device, a value of the at least one item included in the first feature group as a second feature value of the second segment;
managing, by the feature value extraction device, the first feature value corresponding to the first segment and the second feature value corresponding to the second segment; and
determining, by the feature value extraction device, an anomaly in the semiconductor process corresponding to the second time series data based on the comparison of the first feature value and the second feature value.