US 12,455,513 B2
Chemical liquid circulation apparatus, chemical liquid dispensing apparatus, and chemical liquid supply system having the same
Takashi Sasa, Hwaseong-si (KR); and Kyoungwhan Oh, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Sep. 2, 2021, as Appl. No. 17/465,605.
Claims priority of application No. 10-2020-0174227 (KR), filed on Dec. 14, 2020.
Prior Publication US 2022/0187721 A1, Jun. 16, 2022
Int. Cl. G03F 7/00 (2006.01); B05C 11/10 (2006.01); B08B 9/023 (2006.01); B08B 9/032 (2006.01); H01L 21/67 (2006.01)
CPC G03F 7/70925 (2013.01) [B08B 9/023 (2013.01); B08B 9/0321 (2013.01); B08B 9/0328 (2013.01); H01L 21/67051 (2013.01); B08B 2209/032 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A chemical liquid supply system comprising:
a chemical liquid tank comprising an inlet, an outlet, and an external opening between the inlet and the outlet, wherein the inlet is connected to one portion of the external opening, and the outlet is connected to another portion of the external opening, wherein the external opening is configured to receive a chemical liquid introduced through the inlet and temporarily store a volume of the chemical liquid upstream from the outlet, and wherein the volume of the chemical liquid within the opening is exposed to an environment external to the tank, external to the inlet, and external to the outlet;
a chemical liquid supply source configured to supply the chemical liquid to the chemical liquid circulation apparatus; and
a chemical liquid dispensing apparatus configured to move to the external opening of the chemical liquid tank, draw the chemical liquid from the external opening, move to a substrate to be treated and discharge the drawn chemical liquid onto the substrate.