US 12,455,512 B2
Pneumatic controlled flexure system for stabilizing a projection device
Assaf Kidron, Cupertino, CA (US); Jiawei Shi, Santa Clara, CA (US); Liang-Yu Chen, Taipei (TW); Che-Kai Chang, Santa Clara, CA (US); Tsu-Hui Yang, Dongkung Town (TW); Nimrod Smith, Cupertino, CA (US); Grant Wang, Cupertino, CA (US); Preston Fung, Daly City, CA (US); Vasuman Ghanapaati Srirangarajan, Karnataka (IN); Davidi Kalir, Santa Clara, CA (US); and Rudolf C. Brunner, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Appl. No. 18/261,150
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Feb. 1, 2022, PCT No. PCT/US2022/014690
§ 371(c)(1), (2) Date Jul. 12, 2023,
PCT Pub. No. WO2022/169742, PCT Pub. Date Aug. 11, 2022.
Claims priority of application No. 202141004605 (IN), filed on Feb. 3, 2021.
Prior Publication US 2024/0069452 A1, Feb. 29, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70833 (2013.01) [G03F 7/70275 (2013.01); G03F 7/709 (2013.01)] 20 Claims
OG exemplary drawing
 
16. A system, comprising:
a plurality of image projection systems disposed between a first bridge and a second bridge, each image projection system (IPS) having a joint coupled to the second bridge;
a plurality of projection stabilization systems, each projection stabilization system coupled to a respective IPS, each projection stabilization system comprising:
one or more stiffeners, each stiffener having:
a housing coupled to the first bridge with a stiffener mount, the housing having a pneumatic cylinder disposed therein; and
a base coupled to the housing; and
one or more flexures, each flexure coupleable to the base of the respective stiffener and an IPS mount of the respective IPS, wherein each flexure is perpendicular to the joint coupling the respective IPS to the second bridge.