US 12,455,502 B2
Device and method for generating photomasks
Charlotte Beylier, Meylan (FR); Mauricio Garcia Suarez, Santiago (CL); Pascal Urard, Theys (FR); and Guillaume Landie, Lumbin (FR)
Assigned to STMicroelectronics (Crolles 2) SAS, Crolles (FR); and STMicroelectronics France, Montrouge (FR)
Filed by STMicroelectronics (Crolles 2) SAS, Crolles (FR); and STMicroelectronics France, Montrouge (FR)
Filed on Nov. 9, 2022, as Appl. No. 17/983,972.
Claims priority of application No. 2111964 (FR), filed on Nov. 10, 2021.
Prior Publication US 2023/0141388 A1, May 11, 2023
Int. Cl. G06F 30/27 (2020.01); G03F 1/70 (2012.01); G03F 7/00 (2006.01); G06F 30/30 (2020.01); G06F 30/398 (2020.01); G06N 3/094 (2023.01); G06F 119/18 (2020.01); G06N 3/0455 (2023.01); G06N 3/0475 (2023.01)
CPC G03F 1/70 (2013.01) [G03F 7/705 (2013.01); G06F 30/27 (2020.01); G06F 30/398 (2020.01); G06N 3/094 (2023.01); G06F 2119/18 (2020.01); G06N 3/0455 (2023.01); G06N 3/0475 (2023.01)] 17 Claims
OG exemplary drawing
 
1. A method, comprising:
compressing, by a processor, an image comprising first patterns, by transforming the image into a first representation formed of two-point elements, the image covering a surface contained in a plane;
wherein the image is compressed by:
projecting a vertex of a first polygon of the image onto a first point of a first curve running throughout a first surface of the plane; and
projecting the vertex onto a second point of a second curve running throughout a second surface around the first point, the second surface having an area smaller than the area of the first surface;
executing, by a neural network, an inference operation on the first representation to generate a second representation formed of two-point elements; and
generating a lithographic mask based on decompression of the second representation.