US 12,455,487 B2
Optical modulator and method of manufacturing optical modulator
Hiroki Mori, Osaka (JP); Naoya Kono, Osaka (JP); and Mitsuru Ekawa, Osaka (JP)
Assigned to Sumitomo Electric Industries, Ltd., Osaka (JP)
Filed by Sumitomo Electric Industries, Ltd., Osaka (JP)
Filed on Jun. 7, 2022, as Appl. No. 17/833,942.
Claims priority of application No. 2021-098079 (JP), filed on Jun. 11, 2021.
Prior Publication US 2022/0397802 A1, Dec. 15, 2022
Int. Cl. G02F 1/225 (2006.01); G02F 1/21 (2006.01)
CPC G02F 1/2257 (2013.01) [G02F 1/212 (2021.01); G02F 2202/102 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An optical modulator comprising:
a first mesa waveguide extending in a first direction, wherein the first direction is an optical axis direction; and
a second mesa waveguide,
wherein the first mesa waveguide includes a p-type first semiconductor layer disposed over a substrate, a core layer disposed over the p-type first semiconductor layer, a p-type second semiconductor layer disposed over the core layer, and an n-type third semiconductor layer disposed over the core layer, and
wherein the p-type second semiconductor layer and the n-type third semiconductor layer are arranged adjacent to each other in the first direction;
an electrode is disposed over the n-type third semiconductor layer; and
a joining surface between the p-type second semiconductor layer and the n-type third semiconductor layer is inclined with respect to a surface orthogonal to the first direction at an angle of 50° or more to 60° or less.