US 12,455,441 B2
Adjustable infrared optical filter device
Bin Guo, Shenzhen (CN)
Assigned to SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD., Shenzhen (CN)
Appl. No. 17/910,725
Filed by SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD, Shenzhen (CN)
PCT Filed Jan. 17, 2020, PCT No. PCT/CN2020/072828
§ 371(c)(1), (2) Date Sep. 9, 2022,
PCT Pub. No. WO2021/142791, PCT Pub. Date Jul. 22, 2021.
Prior Publication US 2023/0194853 A1, Jun. 22, 2023
Int. Cl. G02B 1/02 (2006.01); G02B 5/20 (2006.01); G02B 26/00 (2006.01); G01J 3/26 (2006.01)
CPC G02B 26/001 (2013.01) [G02B 1/02 (2013.01); G02B 5/208 (2013.01); G01J 3/26 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A tunable infrared optical filter device, comprising a first mirror and a second mirror bonded to each other forming a cavity therebetween, wherein a surface of a portion of the first mirror and the second mirror which are bonded to each other is provided with an electrode for driving the first mirror or the second mirror to move, the first mirror and the second mirror respectively are distributed Bragg reflectors formed by multipoint bonding silicon films, and the portions of the first mirror and the second mirror bonded to each other corresponds to a position of one of the chambers formed through the multipoint bonding.