US 12,455,269 B2
Hydrogen sensing device that can visually detect the presence of hydrogen through color change according to the water formation reaction
Yong-Sang Ryu, Seoul (KR); Yusin Pak, Seoul (KR); Jongsu Lee, Seoul (KR); Taehyun Kim, Seoul (KR); and Eui-Sang Yu, Seoul (KR)
Assigned to Korea Institute of Science and Technology, Seoul (KR)
Filed by KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul (KR)
Filed on Feb. 9, 2023, as Appl. No. 18/107,763.
Claims priority of application No. 10-2022-0090169 (KR), filed on Jul. 21, 2022.
Prior Publication US 2024/0027414 A1, Jan. 25, 2024
Int. Cl. G01N 33/00 (2006.01); B32B 15/04 (2006.01); G01N 21/78 (2006.01); G01N 21/77 (2006.01)
CPC G01N 33/005 (2013.01) [B32B 15/043 (2013.01); G01N 21/78 (2013.01); B32B 2311/04 (2013.01); B32B 2311/06 (2013.01); B32B 2311/08 (2013.01); B32B 2311/09 (2013.01); B32B 2311/12 (2013.01); B32B 2311/22 (2013.01); B32B 2311/24 (2013.01); B32B 2311/30 (2013.01); G01N 2021/7763 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A hydrogen sensing device which visually identifies presence of hydrogen through a color change according to a water-forming reaction, the hydrogen sensing device comprising:
a structure in which a lower metal layer, a dielectric layer, and an upper metal layer are sequentially stacked on a substrate,
wherein the structure has a structural color,
in an environment where hydrogen and oxygen exist, water is formed by a reaction of the hydrogen and the oxygen at an interface between the dielectric layer and the lower metal layer, and
the structural color is changed when the water is formed,
wherein in the environment where the hydrogen and the oxygen exist, the water is formed by the reaction of the hydrogen and the oxygen at the interface between the dielectric layer and the lower metal layer,
wherein the water is formed to a uniform thickness at the interface between the dielectric layer and the lower metal layer,
wherein the water is formed in a case that the hydrogen sensing device is exposed to the hydrogen in advance and the oxygen is supplied in a state in which the lower metal layer is hydrogenated.