US 12,455,249 B2
Sample stage and optical inspection device
Masaya Yamamoto, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/761,933
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Oct. 8, 2019, PCT No. PCT/JP2019/039712
§ 371(c)(1), (2) Date Mar. 18, 2022,
PCT Pub. No. WO2021/070265, PCT Pub. Date Apr. 15, 2021.
Prior Publication US 2022/0373479 A1, Nov. 24, 2022
Int. Cl. H01L 21/67 (2006.01); B23Q 3/00 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC G01N 21/956 (2013.01) [B23Q 3/00 (2013.01); G01N 21/9501 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A sample stage that adsorbs and holds a sample, comprising:
an outer circumference stage that has a first adsorption surface, a pressure receiving chamber as a recess formed in a center thereof, and a first guide;
an inner circumference stage that has a second adsorption surface and that is housed in the pressure receiving chamber and can project upward from the outer circumference stage;
a first flow channel for sample loading/unloading operation that is formed in the outer circumference stage and is open into the first adsorption surface;
a second flow channel for sample loading/unloading operation that is formed in the outer circumference stage and the inner circumference stage and is open into the second adsorption surface;
a third flow channel for inner circumference stage elevating driving that is formed in the outer circumference stage and is open into the pressure receiving chamber; and
a second guide is located under the inner circumference stage; wherein
the first guide is cylindrical, extends upward from a bottom of the pressure receiving chamber to a middle portion of the pressure receiving chamber, and has a gap between its upper surface and the first adsorption surface, and
the second guide is cylindrical and concave and slides over the first guide to guide ascending and descending of the inner circumference stage with respect to the outer circumference stage.
 
6. An optical inspection device comprising:
a sample stage that adsorbs and holds a sample, the sample stage includes:
an outer circumference stage that has a first adsorption surface and a pressure receiving chamber as a recess formed in a center thereof,
an inner circumference stage that has a second adsorption surface and that is housed in the pressure receiving chamber and can project upward from the outer circumference stage,
a first flow channel for sample loading/unloading operation that is formed in the outer circumference stage and is open into the first adsorption surface,
a second flow channel for sample loading/unloading operation that is formed in the outer circumference stage and the inner circumference stage and is open into the second adsorption surface, and
a third flow channel for inner circumference stage elevating driving that is formed in the outer circumference stage and is open into the pressure receiving chamber;
a rotary stage that supports the sample stage;
a parallel movement stage that supports the rotary stage;
a transfer device that transfers a sample to the sample stage using an arm, wherein
the arm is fork-shaped with two claws, and
an outside diameter of the inner circumference stage is smaller than a distance between the two claws and an outside diameter of the outer circumference stage is larger than the distance;
an air supply pump;
an intake pump;
an exhaust port open to an atmospheric air;
a first piping system for sample loading/unloading on the first adsorption surface that connects the intake pump and the exhaust port to the first flow channel;
a second piping system for sample loading/unloading on the second adsorption surface that connects the intake pump and the exhaust port to the second flow channel;
a third piping system for moving up and down the inner circumference stage that connects the air supply pump and the intake pump to the third flow channel; and
control valves that control a fluid flowing in the first piping system, the second piping system, and the third piping system, wherein
the control valves include:
at least one first direction switch valve that is installed in the first piping system and switches the object to be connected to the first flow channel between the intake pump and the exhaust port;
at least one second direction switch valve that is installed in the second piping system and switches the object to be connected to the second flow channel between the intake pump and the exhaust port; and
at least one third direction switch valve that is installed in the third piping system and switches the object to be connected to the third flow channel between the air supply pump and the exhaust port.