| CPC G01N 21/6456 (2013.01) [G01N 21/6452 (2013.01); G02B 21/0032 (2013.01); G02B 21/0036 (2013.01); G01N 2021/6439 (2013.01); G01N 2201/103 (2013.01); G02B 21/06 (2013.01); G02B 2207/113 (2013.01)] | 12 Claims |

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1. A sample observation device comprising:
a light source unit configured to output excitation light to a sample;
an irradiation optical system configured to shape the excitation light into planar light and to irradiate the sample with the planar light on an XZ surface;
a scanning unit configured to scan the sample in a Y-axis direction at a predetermined scanning speed to pass through an irradiation surface of the planar light;
an imaging optical system having an observation axis inclined with respect to the irradiation surface and configured to image an observation light generated in the sample by irradiation with the planar light;
an image acquisition unit configured to acquire a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system at a predetermined frame rate; and
a control unit configured to control a light amount of the planar light and the scanning speed,
wherein the control unit refers to a reference table in which an optimum light amount of the planar light at a measurement sensitivity represented by the product of the light amount of the planar light and the scanning speed is set in accordance with the scanning speed and determines the scanning speed and the optimum light amount of the planar light on the basis of the measurement sensitivity selected by a user.
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