| CPC G01N 21/45 (2013.01) [G01B 9/02007 (2013.01); G01B 9/02008 (2013.01); G01B 9/02012 (2013.01); G01N 33/0027 (2013.01)] | 14 Claims |
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1. An optical comb measuring apparatus that measures an irradiation target having multiple types of measuring targets, comprising:
an interference signal acquiring section arranged to acquire an interference signal between a post-irradiation signal comb obtained by irradiating the irradiation target with a pre-irradiation signal comb and a local comb set to be different from a repetition frequency of the pre-irradiation signal comb by a predetermined differential frequency; and
a frequency spectrum measuring section arranged to measure a frequency spectrum of a result of acquisition by the interference signal acquiring section, wherein
the pre-irradiation signal comb, the post-irradiation signal comb, and the local comb are optical combs,
a power of light with which the irradiation target is irradiated varies at predetermined frequencies corresponding to the respective measuring targets,
a plurality of measurable bands, each of which is a frequency range of the post-irradiation signal comb in which a single frequency of the post-irradiation signal comb corresponds to a frequency of the interference signal, each include one or more of the predetermined frequencies,
either one or both of the post-irradiation signal comb and the local comb provided to the interference signal acquiring section have only components within a plurality of required bands including all of the predetermined frequencies, and
frequency bands of the interference signal corresponding to the plurality of respective required bands have no areas overlapping each other.
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