| CPC G01N 15/0637 (2013.01) [G01N 2015/0046 (2013.01)] | 20 Claims |
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1. A sensor device comprising:
a support structure having a cantilever shape extending in a first direction and having a first end fixed;
a sensing element having a surface and having a resonant frequency which changes according to contaminants adsorbed to the surface, the sensing element being disposed at a second end of the support structure opposite to the first end;
a frequency detector configured to detect the resonant frequency of the sensing element; and
an actuator disposed at the first end of the support structure, wherein the actuator moves the support structure so that the second end of the support structure moves in a second direction perpendicular to the first direction.
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