US 12,455,119 B2
Regenerator for foreline heating
Santosh S. Nesarkar, Karnataka (IN); Harinath Reghunathannair, Karnataka (IN); and Sathishkumar Kummamoorthy, Karnataka (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 7, 2023, as Appl. No. 18/206,861.
Claims priority of application No. 202341026622 (IN), filed on Apr. 10, 2023.
Prior Publication US 2024/0337449 A1, Oct. 10, 2024
Int. Cl. F28D 17/04 (2006.01); F28D 17/02 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC F28D 17/04 (2013.01) [F28D 17/02 (2013.01); H01J 37/32522 (2013.01); H01J 37/32834 (2013.01); H01L 21/67069 (2013.01); H01J 2237/3341 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system comprising:
a plasma-based processing chamber, the plasma-based processing chamber comprising one or more fluid paths configured to circulate a heat transfer fluid;
one or more vacuum systems configured to exhaust process gases from the plasma-based processing chamber, the one or more vacuum systems comprising one or more vacuum pumps and a foreline vent; and
a foreline regenerator comprising:
a regenerator shell at least partially surrounding the foreline vent, the regenerator shell including a heat transfer fluid input and a heat transfer fluid output, wherein the heat transfer fluid input is coupled to an output of the plasma-based processing chamber.