| CPC F04B 45/047 (2013.01) [F04B 41/06 (2013.01)] | 6 Claims |

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1. A gas control device comprising:
a first pump including a first pump casing, a first suction hole and a first discharge hole, wherein the first pump casing has a plurality of outer walls, and the first suction hole and the first discharge hole are provided in the first pump casing;
a second pump including a second pump casing, a second suction hole and a second discharge hole, wherein the second suction hole and the second discharge hole are provided in the second pump casing;
a connection casing;
a first closed space defined as a space surrounded by the first pump casing, the second pump casing, and the connection casing;
a first valve provided on a surface of a first discharge hole side of the first pump casing; and
a second valve provided on a surface of a second discharge hole side of the second pump casing,
wherein the plurality of outer walls include at least a first outer wall, the first discharge hole is provided in the first outer wall, and the first outer wall faces the first closed space,
wherein the first discharge hole and the second suction hole communicate with each other via the first closed space, and
wherein the first valve comprises:
a first plate having a first air vent;
a second plate having a second air vent;
an intermediate plate disposed between the first plate and the second plate; and
a diaphragm disposed adjacent said intermediate plate, wherein in plan view, said diaphragm has an aperture formed therein and overlaps with a valve seat.
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