US 12,454,758 B2
Method of forming metal oxide layer and method of manufacturing perovskite solar cell using the same
Sunghoon Han, Busan (KR); and Changsoon Kim, Seoul (KR)
Assigned to Seoul National University R&DB foundation, Seoul (KR)
Filed by Seoul National University R&DB foundation, Seoul (KR)
Filed on Oct. 12, 2023, as Appl. No. 18/486,119.
Claims priority of application No. 10-2022-0144613 (KR), filed on Nov. 2, 2022.
Prior Publication US 2024/0141499 A1, May 2, 2024
Int. Cl. C23C 18/12 (2006.01); H10F 10/174 (2025.01); H10F 71/00 (2025.01)
CPC C23C 18/1216 (2013.01) [C23C 18/1283 (2013.01); C23C 18/1295 (2013.01); H10F 10/174 (2025.01); H10F 71/1215 (2025.01); H10F 71/138 (2025.01)] 19 Claims
OG exemplary drawing
 
1. A method of forming a metal oxide layer comprising:
forming a parent metal oxide layer on a substrate structure;
changing the parent metal oxide layer into a cation-exchanged metal oxide layer through a cation exchange reaction between cations in the parent metal oxide layer and cations in a reaction solution by contacting the parent metal oxide layer with the reaction solution; and
performing a heat treatment process on the cation-exchanged metal oxide layer,
wherein the parent metal oxide layer includes a first binary metal oxide, and the cation-exchanged metal oxide layer includes a second binary metal oxide different from the first binary metal oxide.