US 12,454,750 B2
Evaporator for effective surface area evaporation
Sambhu Kundu, Fremont, CA (US); PrasannaKalleshwara Buddappa Ramachandrappa, Santa Clara, CA (US); Vicente M. Lim, Newark, CA (US); Subramanya P. Herle, Mountain View, CA (US); and Visweswaren Sivaramakrishnan, Cupertino, CA (US)
Assigned to Elevated Materials US LLC, Santa Clara, CA (US)
Filed by Elevated Materials US LLC, Santa Clara, CA (US)
Filed on Aug. 4, 2022, as Appl. No. 17/881,368.
Claims priority of provisional application 63/232,348, filed on Aug. 12, 2021.
Prior Publication US 2023/0048728 A1, Feb. 16, 2023
Int. Cl. C23C 14/24 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01)
CPC C23C 14/243 (2013.01) [C23C 14/541 (2013.01); C23C 14/568 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An evaporation assembly, comprising:
a flat bottom crucible for holding a material to be evaporated, the flat bottom crucible comprising a rectangular body defining an interior region for holding the material to be evaporated, the rectangular body having an opening through which the evaporated material can escape, the opening opposite a bottom surface, the rectangular body having a length dimension and a width dimension defining an evaporation surface area and a plurality of baffles dividing the rectangular body into compartments, each baffle of the plurality of baffles extending from the bottom surface through the opening, wherein a baffle of the plurality of baffles comprises a baffle plate having a through-hole configured to allow the material to be evaporated to travel between at least two compartments of the compartments; and
an evaporator body fluidly coupled with the rectangular body, the evaporator body comprising a top surface having a plurality of linear arrays of nozzles each nozzle having an opening defined by a diameter, wherein a total area of the openings defines a nozzle opening surface area and the evaporation surface area is greater than the nozzle opening surface area.