	US 12,454,630 B2
	Dispersion composition of cerium oxide composite powder
Se Ho Song, Sejong (KR); Moon Sung Cho, Sejong (KR); and Jung Wan Kim, Daejeon (KR)
Assigned to ADVANCED NANO PRODUCTS CO., LTD., Sejong (KR)
Appl. No. 17/636,797
Filed by ADVANCED NANO PRODUCTS CO., LTD., Sejong (KR)
PCT Filed Jul. 7, 2021, PCT No. PCT/KR2021/008650 § 371(c)(1), (2) Date Feb. 18, 2022, PCT Pub. No. WO2022/010257, PCT Pub. Date Jan. 13, 2022.
Claims priority of application No. 10-2020-0083681 (KR), filed on Jul. 7, 2020.
Prior Publication US 2023/0121006 A1, Apr. 20, 2023
Int. Cl. C09G 1/02 (2006.01); C01F 17/235 (2020.01); C09K 3/14 (2006.01)

CPC C09G 1/02 (2013.01) [C01F 17/235 (2020.01); C09K 3/1409 (2013.01); C01P 2004/64 (2013.01)]

6 Claims

1. A cerium oxide composite powder dispersion composition for CMP, the composition comprising:

first cerium oxide particles having an average particle size of 20 nm or more and less than 40 nm; and

second cerium oxide particles having an average particle size of 1 nm to 6 nm,

wherein the first cerium oxide particles and the second cerium oxide particles are mixed in a weight ratio of 6:4 to 4:6,

wherein an average density of the cerium oxide composite powder contained in a solution of the dispersion composition is in a range of 1.55 g/mL to 1.77 g/mL,

wherein the first cerium oxide particles have a prismatic shape, and the second cerium oxide particles having a spherical shape and have a surface activated by hydrothermal synthesis, and

wherein the composition exhibits a polishing rate of 17,000 Å/min or more.