US 12,453,991 B2
Foreign particle removing method, formation method, article manufacturing method, foreign particle removing apparatus, and system
Hisanobu Azuma, Kanagawa (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 12, 2023, as Appl. No. 18/299,255.
Claims priority of application No. 2022-073676 (JP), filed on Apr. 27, 2022.
Prior Publication US 2023/0347390 A1, Nov. 2, 2023
Int. Cl. G03F 7/20 (2006.01); B08B 7/00 (2006.01); G03F 7/00 (2006.01); H01L 21/02 (2006.01)
CPC B08B 7/0014 (2013.01) [G03F 7/70925 (2013.01); H01L 21/02057 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A foreign particle removing method of removing a foreign particle presumably on a first member including a first pattern with concave and convex portions, the method comprising:
supplying a composition on the first member;
pressing a second member against the composition supplied on the first member to spread the composition on the first member and entrap, in the composition, the foreign particle presumably on the first member;
curing the composition on the first member after the pressing, in a state where the composition and the second member are in contact with each other; and
separating the second member together with the composition from the first member, after the curing,
wherein the supplying controls a supply amount of the composition on the first member based on a cure shrinkage rate of the composition in the curing and an estimated size of the foreign particle being presumably on the first member, so that a thickness of a portion of the cured composition, which exists between the second member and a convex portion of the first pattern of the first member, becomes larger than the estimated size.