US 12,127,480 B2
On-substrate mechanical stress sensing and compensation
Umidjon Nurmetov, Munich (DE); Ralf Peter Brederlow, Poing (DE); Baher Haroun, Allen, TX (US); Jose Antonio Vieira Formenti, Dallas, TX (US); Michael Szelong, Freising (DE); and Tobias Bernhard Fritz, Mainburg (DE)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by Texas Instruments Incorporated, Dallas, TX (US)
Filed on Jul. 17, 2020, as Appl. No. 16/932,343.
Prior Publication US 2022/0020915 A1, Jan. 20, 2022
Int. Cl. G01L 1/18 (2006.01); G01L 1/22 (2006.01); H10N 30/30 (2023.01); H10N 30/80 (2023.01)
CPC H10N 30/302 (2023.02) [G01L 1/18 (2013.01); G01L 1/2268 (2013.01); H10N 30/802 (2023.02)] 22 Claims
OG exemplary drawing
 
1. A circuit comprising:
a sense resistor having a first resistance that reflects a stress along a particular axis;
a calibrated resistor having a second resistance; and
a compensating circuit having an input terminal and an output terminal, the input terminal coupled to at least one of the sense resistor or to the calibrated resistor, and the compensating circuit configured to provide a compensation signal at the output terminal based on the first resistance and the second resistance.