US 12,127,467 B2
Organic vapor jet micro-print head with multiple gas distribution orifice plates
Gregory McGraw, Yardley, PA (US); William E. Quinn, Whitehouse Station, NJ (US); and Roman Korotkov, Cranbury, NJ (US)
Assigned to Universal Display Corporation, Ewing, NJ (US)
Filed by Universal Display Corporation, Ewing, NJ (US)
Filed on Jul. 8, 2021, as Appl. No. 17/370,050.
Application 17/370,050 is a continuation of application No. 16/711,476, filed on Dec. 12, 2019, granted, now 11,088,325.
Claims priority of provisional application 62/794,265, filed on Jan. 18, 2019.
Prior Publication US 2021/0343942 A1, Nov. 4, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H10K 71/13 (2023.01); B05C 5/02 (2006.01); B41J 2/14 (2006.01); H10K 71/00 (2023.01); H10K 85/40 (2023.01)
CPC H10K 71/135 (2023.02) [B05C 5/0275 (2013.01); B41J 2/1433 (2013.01); H10K 71/00 (2023.02); H10K 85/40 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a micronozzle array including:
a linear array having a plurality of depositors connected in series, wherein a first depositor of the plurality of depositors borders a second depositor on a least one side boundary;
at least one heater to heat the plurality of depositors of the linear array; and
a plurality of orifice arrays, wherein a width of each orifice in the plurality of orifice arrays is 20 μm or less in a minor axis of its cross section to flow, to regulate flow through a delivery gas distribution channel and a plurality of exhaust distribution channels, wherein the delivery gas distribution channel and at least one of the plurality of exhaust distribution channels have separate fluid communication with each of the plurality of depositors.