US 12,127,382 B2
Semiconductor module with cooling fins in a matrix form
Yoshihiro Tateishi, Matsumoto (JP); Tatsuhiko Asai, Hino (JP); Takahiro Koyama, Matsumoto (JP); and Hiromichi Gohara, Matsumoto (JP)
Assigned to FUJI ELECTRIC CO., LTD., Kawasaki (JP)
Filed by FUJI ELECTRIC CO., LTD., Kawasaki (JP)
Filed on Feb. 24, 2022, as Appl. No. 17/679,867.
Application 17/679,867 is a continuation of application No. PCT/JP2021/002072, filed on Jan. 21, 2021.
Claims priority of application No. 2020-047766 (JP), filed on Mar. 18, 2020.
Prior Publication US 2022/0183194 A1, Jun. 9, 2022
Int. Cl. H05K 7/20 (2006.01); H01L 23/367 (2006.01); H01L 23/473 (2006.01); H01L 25/07 (2006.01); H01L 25/18 (2023.01)
CPC H05K 7/20927 (2013.01) [H01L 23/3677 (2013.01); H01L 23/473 (2013.01); H05K 7/20254 (2013.01); H01L 25/072 (2013.01); H01L 25/18 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A semiconductor module including a cooling device, the cooling device comprising:
a ceiling plate;
a side wall connected to the ceiling plate;
a bottom plate opposed to the ceiling plate and connected to the side wall;
a plurality of pin fins having a polygonal shape and arranged separately from each other in a matrix form in a planar view in which one end of the respective pin fins is connected to a fin region having a rectangular shape and separated from the side wall on a surface of the ceiling plate opposed to the bottom plate;
an inlet for a coolant having a center of a flow path at a position adjacent to a part of one of long sides of the fin region in the planar view; and
an outlet for the coolant having a center of a flow path at a position adjacent to a part of another one of the long sides of the fin region in the planar view,
wherein matrix directions of the respective pin fins make an angle with a straight line connecting the position of the inlet and the position of the outlet,
a length of a segment of the straight line passing across the fin region is longer than a length of short sides of the fin region, and
a direction in which an angle with respect to one of the short sides of the fin region increases is defined as a positive direction, and a direction in which an angle with respect to the one of the short sides of the fin region decreases is defined as a negative direction, and one side of the respective pin fins makes an angle with the straight line in a range of −40 degrees or greater and −30 degrees or less or an angle of 30 degrees or greater and 40 degrees or less.