US 12,125,781 B2
Cell having stacked pick-up region
Chung-Hui Chen, Hsinchu (TW); and Hao-Chieh Chan, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on Jul. 22, 2022, as Appl. No. 17/871,213.
Application 17/871,213 is a division of application No. 16/660,363, filed on Oct. 22, 2019, granted, now 11,562,953.
Claims priority of provisional application 62/749,578, filed on Oct. 23, 2018.
Prior Publication US 2022/0359367 A1, Nov. 10, 2022
Int. Cl. H01L 27/02 (2006.01); G06F 30/39 (2020.01); H01L 21/8238 (2006.01); H01L 23/50 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01)
CPC H01L 23/50 (2013.01) [G06F 30/39 (2020.01); H01L 21/823892 (2013.01); H01L 23/5226 (2013.01); H01L 23/5286 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
forming a first well of a first-type in a substrate of a second-type;
forming a first active zone of the first-type, in a second well of the second-type on the substrate, extending in a first direction;
forming a second active zone of the second-type in the first-type well, extending in the first direction;
forming a first pick-up region of the first-type located in the first well;
forming a second pick-up region of the second-type located in the second well;
wherein the first pick-up region and the second pick-up region are separated from each other, by the first active zone and the second active zone, along a second direction that is different from the first direction;
forming a first power rail and a second power rail extending in the first direction;
forming a first conductive segment extending in the second direction which conductively connects the first pick-up region to the first power rail to maintain the first well at a first supply voltage by holding the first pick-up region at the first supply voltage on the first power rail, wherein the first pick-up region is laterally shifted from the first power rail along the second direction and positioned laterally between the second active zone and the first power rail; and
forming a second conductive segment extending in the second direction which conductively connects the second pick-up region to the second power rail to maintain the second well at a second supply voltage by holding the second pick-up region at the second supply voltage on the second power rail, wherein the second pick-up region is laterally shifted from the second power rail along the second direction and positioned laterally between the first active zone and the second power rail.