US 12,125,738 B2
Storage module, substrate processing system, and method of transferring consumable member
Norihiko Amikura, Miyagi (JP); and Masatomo Kita, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jun. 18, 2021, as Appl. No. 17/351,294.
Claims priority of application No. 2020-106519 (JP), filed on Jun. 19, 2020.
Prior Publication US 2021/0398838 A1, Dec. 23, 2021
Int. Cl. H01L 21/68 (2006.01); H01L 21/60 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68721 (2013.01) [H01L 21/60 (2021.08); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A storage module comprising:
a chamber:
a support disposed in the chamber;
a sensor configured to detect an orientation of a consumable structure on the support;
a driver configured to rotate the support based on the orientation of the consumable structure detected by the sensor;
a storage disposed below the support in the chamber and configured to store the consumable structure; and
an elevator configured to vertically move the storage in the chamber.